If you get something like this error when deploying the CPU monitor, most likely there are more cores than SiteScope is set to handle.
CPU: pnetdb1a ‑ cpu . Error: Internal error: java.lang.ArrayIndexOutOfBoundsException.
Solution: Up the cores allowed in the master.config as below.
Open master.config file and modify a value for _cpuMaxProcessors. Set the value large enough, e.g. _cpuMaxProcessors=32. Remember to restart SiteScope service for the change to take effect.